Microelectronics are essential to modern society – from personal technology devices to transportation, security, alternative energy systems, and industrial manufacturing. With most microelectronic manufacturers located overseas and worsening global supply chain disruptions, US microelectronics fabrication has become more critical than ever. The passing of the Chips and Science Act of 2022 has provided more than $350 billion for manufacturers to focus on domestic microelectronics production, with a partial breakdown listed below:

  • $200B for R&D and commercialization
  • $52.7B for semiconductor manufacturing
  • $24B in tax credits for chip production
  • 25% advanced manufacturing investment credit for any private investments in semiconductor manufacturing (est. $24B over five years)
  • $2B for the Dept. of Defense, meant to fund fabrication, research, and workforce training of microelectronics
  • $50B for the Dept. of Commerce, intended to expand domestic manufacturing of semiconductors

The Need for Air Pollution Control (APC) in Microelectronic Manufacturing

As we transition from fossil fuels to renewable energy alternatives, the need for microelectronics will continue to increase. Semiconductors and microelectronics play critical roles in transitioning to a zero-carbon energy infrastructure. Despite the importance of these materials, the production processes required are resource intensive and often require air pollution control equipment. For example, wafer etching and chamber cleaning use gases and can emit perfluorochemicals, persistent organic pollutants, ammonia, and fine particulate.

What APC Technologies Treat Microelectronics Emissions?

The most suitable system for your application will be dependent on many factors. Some technologies that may be applied to microelectronics production are:

APC Designed to your Microelectronics Manufacturing Needs

Each application has its own distinct challenges, so air pollution control technology is not a one-size-fits-all solution. Our engineering design team holistically examines your process to determine the most appropriate solutions for your specific exhaust stream while balancing your overall cost of ownership.

Close-up view of Turquoise Colored Microelectronic Circuit Board with a Large Square Black Semiconductor and smaller Copper, black and silver microchips and terminals